Bi2Te3 as an active material for MEMS based devices fabricated at room temperature
- Citation:
- Sedky, S., A. Kamal, M. Yomn, H. Bakr, R. Ghannam, V. Leonov, and P. Fiorini, "Bi2Te3 as an active material for MEMS based devices fabricated at room temperature", Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International: IEEE, pp. 1035-1038, 2009.
Abstract:
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Notes:
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