Bulk Mode Disk Resonator With Transverse Piezoelectric Actuation and Electrostatic Tuning

Citation:
Elsayed, M. Y., P. - V. Cicek, F. Nabki, and M. N. El-Gamal, "Bulk Mode Disk Resonator With Transverse Piezoelectric Actuation and Electrostatic Tuning", Journal of Microelectromechanical Systems, vol. 25, issue 2: IEEE, pp. 252-261, 2016.

Abstract:

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Notes:

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