18-MHz Silicon Lamé Mode Resonators With Corner and Central Anchor Architectures in a Dual-Wafer SOI Technology
- Citation:
- Elsayed, M. Y., and F. Nabki,
"18-MHz Silicon Lamé Mode Resonators With Corner and Central Anchor Architectures in a Dual-Wafer SOI Technology",
Journal of Microelectromechanical Systems: IEEE, 2016.
Abstract:
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Notes:
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