18-MHz Silicon Lamé Mode Resonators With Corner and Central Anchor Architectures in a Dual-Wafer SOI Technology

Citation:
Elsayed, M. Y., and F. Nabki, "18-MHz Silicon Lamé Mode Resonators With Corner and Central Anchor Architectures in a Dual-Wafer SOI Technology", Journal of Microelectromechanical Systems: IEEE, 2016.

Abstract:

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Notes:

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