A novel technique for die-level post-processing of released optical MEMS

Citation:
Elsayed, M. Y., P. - O. Beaulieu, J. Briere, M. Ménard, and F. Nabki, "A novel technique for die-level post-processing of released optical MEMS", Journal of Micromechanics and Microengineering, vol. 26, issue 5: IOP Publishing, pp. 057001, 2016.

Abstract:

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Notes:

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