Modal analysis of microgrippers used in assembly of MEMS devices | Yasser Anis

Modal analysis of microgrippers used in assembly of MEMS devices

Citation:: Anis, Y. H., W. L. Cleghorn, and J. K. Mills, "Modal analysis of microgrippers used in assembly of MEMS devices", MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on: IEEE, pp. 281–286, 2005.

Abstract:

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