Acceleration of groove formation in silicon using catalytic wire electrodes for development of a slicing technique

Citation:
Mohamed Shaker Salem, C. - L. Lee, S. Ikeda, and M. Matsumura, "Acceleration of groove formation in silicon using catalytic wire electrodes for development of a slicing technique", Journal of Materials Processing Technology, vol. 210, issue 2: Elsevier, pp. 330-334, 2010.

Abstract:

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